Determination of impurities in ultra-high purity aluminum by glow discharge mass spectrometry

In ultra-high purity aluminum,44 trace impurity elements such as B, Mg, Si, P, Cl, Ti were determined by glow discharge mass spectrometry (GDMS). The results are consistent with those analyzed by inductive coupled plasma mass spectrometry (ICPMS). The pre-sputtering time and elimination of the influence of spectral interference were discussed in detail. The RSFs of 26 main trace impurity elements were calibrated by aluminum standard samples. The result with good precision and accuracy was obtained. It is found that GDMS is one of the most effective method which has sufficient sensitivity on the measurement of ultra-high purity aluminum.